If the electron beam in the scanning electron microscope hits the surface of a specimen, a variety of materials (minerals, semiconductors, ceramics, glasses, plastics) emits light in the range of approx. 200 nm to 1800 nm (cathodoluminescence, CL). The spectral analysis of the CL and its distribution over the whole sample yields new information about the material which cannot be obtained by other measuring methods.

SEMCL is an imaging CL-spectrometer (SEMCL View a CL imaging system). As a unique property, the CL collection is done using an ellipsoidic mirror segment (adjustable under vacuum). The sample is in the first focal point of the ellipsoid and the emitted light is directly focused into the second focal point without the need of further optical devices which always would cause losses and artifacts. At this position the CL spectrometer and the detector is placed, respectively. The mirror housing is retractable via a vacuum feedthrough.

As a further advantage during CL collection with the ellipsoidic mirror segment, the sample remains visible for most of the other detectors of the scanning electron microscope. Therefore, further measurements (e.g. EDS and WDS analyses) may be performed simultaneously.

Modes of Operation:

• polychromatic imaging (spatially resolving imaging of all CL processes)
  
• monochromatic imaging (spatially resolving imaging of one single CL process, 'spectral imaging' (option) : additionally the spectrum is detected per pixel)
  
• Cathodoluminescence Spectroscopy (CL spectra of a particular specimen location)
  
• time resolving measurements (measuring the CL decay times or time delayed spectroscopy)
  

  Your advantages:

  • CL collection loss- and artifact free by means of an ellipsoidic mirror (adjustable under vacuum by motorization)
    
  • simultaneous measurements with other SEM detectors (EDS, WDS, SE, BSE) guaranteed
    
  • retrofit of SEMCL View to complete spectrometer SEMCL easily possible
    
  • spectral range of approx. 150 nm up to 1800 nm (UV, VIS, IR) by various detectors (photomultipliers and CCD cameras)
    
  • various grating monochromators (200 or 300 mm focal length) with up to 4-fold grating changers (approx. 40 different gratings with different blaze angles or grating constants are available)
    
  • time resolving measurements (single photon counting) e.g. for detecting decay times of optoelectronic devices (down to ns range)
    
  • qualified installation and on-site training
    
  • favourable cost-performance ratio
    
  • easy to operate, retractable, easy to adapt
    

  DOWNLOAD: Detailed description of EMSystem's SEMCL (PDF, 3,04MB)